The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2007
Filed:
Feb. 28, 2006
Vishwas V. Hardikar, Phoenix, AZ (US);
James A. Schlueter, Phoenix, AZ (US);
Guangshun Chen, Phoenix, AZ (US);
Vishwas V. Hardikar, Phoenix, AZ (US);
James A. Schlueter, Phoenix, AZ (US);
Guangshun Chen, Phoenix, AZ (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
A method and apparatus are provided for post-CMP cleaning of a semiconductor work piece. The method comprises the steps of subjecting the work piece to a first cleaning composition having one of an acidic pH and a basic pH and subjecting the work piece to a second cleaning composition having an acidic pH, if the first cleaning composition has a basic pH and subjecting the work piece to a second cleaning composition having a basic pH, if the first cleaning composition has an acidic pH.