This inventor holds 2 USPTO granted patents and 3 published patent applications. Top assignee: Asml Netherlands B.v.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Vincent Claude Beugin: Innovator in Charged Particle Technology
Introduction
Vincent Claude Beugin is a notable inventor based in Nootdorp, Netherlands. He has made significant contributions to the field of charged particle technology, holding 2 patents that showcase his innovative approach to engineering.
Latest Patents
Beugin's latest patents include a "Multi-beam charged particle column" and a "Charged particle system, aperture array, charged particle tool and method of operating a charged particle system." The multi-beam charged particle column is designed to project a multi-beam of charged particles towards a target. It features an aperture array with at least two different aperture patterns and a rotator that allows for the rotation of the aperture array. The charged particle system generates a charged particle multi-beam along a multi-beam path, incorporating an aperture array, a beam limit array, and a condenser lens. This system is engineered to selectively operate different rotation settings, defining various ranges of beam paths.
Career Highlights
Vincent Claude Beugin is currently employed at ASML Netherlands B.V., a leading company in the semiconductor industry. His work focuses on advancing technologies that enhance the precision and efficiency of charged particle systems.
Collaborations
Beugin collaborates with talented individuals such as Diego Martinez Negrete Gasque and Weihua Yin, contributing to a dynamic and innovative work environment.
Conclusion
Vincent Claude Beugin's contributions to charged particle technology reflect his dedication to innovation and engineering excellence. His patents and work at ASML Netherlands B.V. position him as a key figure in the advancement of this critical field.