This inventor holds 8 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 1995-2001.
Location History:
- Milpitas, CA (US) (1995 - 2001)
- Dublin, CA (US) (2001)
Company Filing History:
Years Active: 1995-2001
Title: Viktor Shel: Innovator in Plasma Reactor Technology
Introduction
Viktor Shel is a prominent inventor based in Milpitas, CA, known for his contributions to plasma reactor technology. With a total of 8 patents, he has made significant advancements in the fabrication processes of semiconductor integrated circuits.
Latest Patents
One of his latest inventions is the "Inductively Coupled Parallel-Plate Plasma Reactor with a Conical Dome." This plasma reactor is designed for the etching of semiconductor integrated circuits. The chamber features a truncated conical dome at the top, with a counter electrode positioned at the dome's apex. An RF coil is wrapped around the dome to inductively couple RF energy into the plasma. The temperature of the dome can be controlled through various methods, including attaching a heat sink or using a rigid thermal control sheath. This sheath can incorporate resistive heating or fluid cooling, ensuring optimal thermal management.
Another notable patent is the "RF Tuning Method for an RF Plasma Reactor Using Frequency Servoing and Power, Voltage, Current or DI/DT Control." This invention optimizes the RF signal generator's frequency and output magnitude by sensing RF parameters, enhancing the efficiency of the plasma reactor.
Career Highlights
Viktor Shel is currently employed at Applied Materials, Inc., a leading company in the semiconductor manufacturing industry. His work focuses on developing innovative solutions that improve the performance and efficiency of plasma reactors.
Collaborations
Throughout his career, Viktor has collaborated with notable colleagues, including Craig A. Roderick and Kenneth S. Collins. These partnerships have contributed to the advancement of technology in the field of semiconductor fabrication.
Conclusion
Viktor Shel's innovative work in plasma reactor technology has significantly impacted the semiconductor industry. His patents reflect a commitment to enhancing fabrication processes, making him a key figure in this field.