The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 1995
Filed:
Nov. 12, 1992
Applicant:
Inventors:
Kenneth S Collins, San Jose, CA (US);
John Trow, San Jose, CA (US);
Craig A Roderick, San Jose, CA (US);
Jay D Pinson, II, San Jose, CA (US);
Douglas A Buchberger, II, Tracy, CA (US);
Robert P Hartlage, Sunnyvale, CA (US);
Viktor Shel, Milpitas, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01F / ;
U.S. Cl.
CPC ...
336155 ; 336 57 ; 336 / ; 336196 ;
Abstract
The disclosure discusses impedance matching circuits based on parallel-resonant L-C tank circuits, and describes a low-loss design for an adjustable inductance element suitable for use in these parallel tank circuits. The application of an impedance matching circuit to a plasma process is also disclosed; in this context, a local impedance transformation circuit is used to improve power transfer to the plasma source antenna.