The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 1996
Filed:
Aug. 22, 1995
Kenneth S Collins, San Jose, CA (US);
John Trow, San Jose, CA (US);
Craig A Roderick, San Jose, CA (US);
Jay D Pinson, II, San Jose, CA (US);
Douglas A Buchberger, II, Tracy, CA (US);
Robert P Hartlage, Sunnyvale, CA (US);
Viktor Shel, Milpitas, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A plasma processing system including a plasma processing chamber; an antenna circuit including a source antenna positioned relative to the processing chamber so as to couple energy into a plasma within the chamber during processing, the antenna circuit having a first terminal and a second terminal with the source antenna electrically coupled between the first and second terminals; and a local impedance transforming network connected to the antenna circuit, the local impedance transforming network including a first capacitor connected between the first terminal and a grounded node, and a second capacitor connected between the second terminal and the grounded node.