Vaclav Jelinek

Title: The Innovative Contributions of Vaclav Jelinek

Introduction

Vaclav Jelinek is a notable inventor based in River Edge, NJ (US), recognized for his significant contributions to semiconductor technology. With a total of six patents to his name, Jelinek has made strides in the field of wafer processing and handling.

Latest Patents

Among his latest patents is a "Wafer Holding Assembly and Wafer Processing Apparatus." This invention provides a unique wafer holder designed for semiconductor wafer processing, particularly useful when wafers are held and moved in orientations other than upwardly facing. The holder features an annular wafer mounting ring that is resiliently mounted and biased against an annular wafer holder housing. It includes pivotally mounted latches made of non-metallic materials, equipped with rollers that conform to the curvature of spherical detents on the mounting ring. This design ensures a secure grip on the wafer while preventing plasma formation around the latches during processing. Another significant patent is the "Apparatus and Method for Clamping a Substrate." This apparatus is designed to clamp a substrate or wafer with a predetermined force during a sputtering process, maintaining a minimal gap between the wafer and backplane for uniform temperature distribution. The innovative design incorporates a first suspension system with a diaphragm and a second suspension system with a mounting ring, ensuring effective loading and minimal edge gaps.

Career Highlights

Vaclav Jelinek has worked with prominent companies in the semiconductor industry, including Tokyo Electron Limited and SSMC Inc. His experience in these organizations has contributed to his expertise and innovative capabilities in wafer processing technologies.

Collaborations

Throughout his career, Jelinek has collaborated with notable professionals such as Steven D. Hurwitt and Anthony D. Spasiano. These collaborations have likely enriched his work and led to advancements in semiconductor technology.

Conclusion

Vaclav Jelinek's contributions to the field of semiconductor technology through his patents and career experiences highlight his role as an influential inventor. His innovative designs continue to impact the industry positively.