Uwe Schilling

Title: Uwe Schilling: Innovator in Semiconductor Technology

Introduction

Uwe Schilling is a prominent inventor based in Dresden, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on innovative methods that enhance the production and functionality of semiconductor components.

Latest Patents

One of Uwe Schilling's latest patents is a method for producing a cavity in a monocrystalline silicon substrate and a semiconductor component having a cavity in a monocrystalline silicon substrate with an epitaxial covering layer. This invention describes a semiconductor component that features a cavity formed in a monocrystalline silicon substrate. The wall of the cavity is covered by a cover layer, particularly in the upper collar region, and a covering layer is applied to the surface of the silicon substrate using a selective epitaxial growth method. This method is not only physically simple but also cost-effective. It is particularly useful for covering a trench prior to high-temperature processes during the production of DRAM memory, allowing for the trench to be reopened after these processes to provide a trench capacitor.

Another notable patent by Schilling is a method for producing antifuse structures and antifuses for the selective electrical connection of adjacent conductive regions. This method involves applying a sacrificial layer to a first conductive region, which is then patterned using a photolithographic method. Following this, a fuse layer is applied, and the sacrificial layer is removed. A non-conductive layer is then applied, and a conductive material is introduced in an opening in the non-conductive layer to form a second conductive region.

Career Highlights

Uwe Schilling is currently employed at Infineon Technologies AG, where he continues to innovate in the semiconductor field. His work has been instrumental in advancing technologies that are critical for modern electronic devices.

Collaborations

Throughout his career, Uwe has collaborated with notable colleagues, including Matthias Lehr and Veronika Polei. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.

Conclusion

Uwe Schilling's contributions to semiconductor technology through his innovative patents and collaborations highlight his role as a key inventor in the field. His work continues to influence the development of advanced electronic components.