Location History:
- Taipei, TW (2003)
- Tai-nan, TW (2004)
- Taipei Hsien, TW (2006)
Company Filing History:
Years Active: 2003-2006
Title: Innovations of Tzu-Shin Chen
Introduction
Tzu-Shin Chen is a notable inventor based in Taipei Hsien, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the area of polishing heads and vacuum suction mechanisms. With a total of three patents to his name, Chen's work has had a considerable impact on the industry.
Latest Patents
One of Tzu-Shin Chen's latest patents is a vacuum suction membrane for holding silicon wafers. This innovative membrane is designed for vacuum suction of silicon wafers, which are typically used inside polishing heads. The membrane features a flat main body with multiple protrusions that have a spiny shape. These protrusions are strategically positioned to correspond with the holes of a supporting multiple-hole panel. By lowering the suction pressure between the wafer and the membrane, the design minimizes the risk of wafer unloading failure.
Another significant patent by Chen is a polishing head with a floating knife-edge mechanism. This polishing head includes a base and a retaining ring that defines a pocket area beneath the base. A lower assembly floats within this pocket area via a diaphragm seal. The lower assembly consists of a disk-shaped support plate with several apertures in its center region, a clamp ring for securing the diaphragm seal, and the floating knife-edge mechanism positioned between the rim and center regions of the support plate.
Career Highlights
Throughout his career, Tzu-Shin Chen has worked with prominent companies in the semiconductor industry, including United Microelectronics Corporation and United Microelectric Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas.
Collaborations
Tzu-Shin Chen has collaborated with several talented individuals in his field, including Ming-Hsing Kao and Wen-Chin Lin. These collaborations have contributed to the advancement of technology in semiconductor manufacturing.
Conclusion
Tzu-Shin Chen's contributions to the field of semiconductor technology through his innovative patents demonstrate his expertise and commitment to advancing the industry. His work continues to influence the development of efficient and effective solutions in semiconductor manufacturing.