The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2006
Filed:
Mar. 28, 2002
Tzu-shin Chen, Taipei Hsien, TW;
Ming-hsing Kao, Tainan Hsien, TW;
Wen-chin Lin, Kaohsiung Hsien, TW;
Hua-bin Chi, Yunlin Hsien, TW;
Tzu-Shin Chen, Taipei Hsien, TW;
Ming-Hsing Kao, Tainan Hsien, TW;
Wen-Chin Lin, Kaohsiung Hsien, TW;
Hua-Bin Chi, Yunlin Hsien, TW;
United Microelectronics Corp., Hsinchu, TW;
Abstract
A membrane for vacuum suction of a silicon water typically used inside a polishing head. The membrane has a flat main body and a plurality of protrusions each having a spiny shape over the surface of the flat main body. The protrusions are formed in positions that correspond to the holes of a supporting multiple-hole panel. The protrusions on the flat main body lower the suction pressure between the wafer and the membrane somewhat so that wafer unloading failure is minimized.