Company Filing History:
Years Active: 2023-2025
Title: Tzu-Jung Pan: Innovator in Semiconductor Technology
Introduction
Tzu-Jung Pan is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on enhancing the efficiency and longevity of photolithography systems, which are crucial in the semiconductor manufacturing process.
Latest Patents
One of Tzu-Jung Pan's latest patents is a semiconductor processing tool and method of using the same. This invention features a plurality of hydrogen outlets arranged along a direction normal to a surface of an extreme ultraviolet lithography (EUV) tool. The design aims to increase the volume of hydrogen gas surrounding the surface, thereby reducing airborne tin contamination. This innovation leads to fewer tin deposits, resulting in an increased lifetime for the surface and reduced downtime for the EUV tool. Additionally, a control device can monitor tin contamination levels and adjust hydrogen flow rates accordingly, enhancing the cleaning efficiency of the hydrogen gas.
Another notable patent is a system and method for detecting debris in a photolithography system. This invention includes a scanner that directs EUV light onto an EUV reticle. The system incorporates contamination reduction structures designed to attract and decompose contaminant particles within the scanner. These structures utilize a highly electronegative surface material to effectively manage contamination.
Career Highlights
Tzu-Jung Pan is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing technologies that improve the performance and reliability of semiconductor manufacturing processes.
Collaborations
Throughout his career, Tzu-Jung Pan has collaborated with notable colleagues, including Shang-Chieh Chien and Li-Jui Chen. These partnerships have contributed to the development of innovative solutions in the semiconductor field.
Conclusion
Tzu-Jung Pan's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in photolithography systems, ensuring greater efficiency and reliability in semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.