This inventor holds 1 USPTO granted patent. Top assignee: Vanguard International Semiconductor Corporation. Active years: 2000.
Company Filing History:
Years Active: 2000
Title: Innovations of Tung Chia Ching in Semiconductor Technology
Introduction
Tung Chia Ching is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the development of processes for forming DRAM capacitor structures. His innovative work has led to the filing of a patent that showcases his expertise and creativity in this specialized area.
Latest Patents
Tung Chia Ching holds a patent for a process related to post chemical mechanical polishing and cleaning procedures. This patent, which is crucial for forming a DRAM capacitor structure, involves a high surface area (HSG) silicon/polysilicon crown-shaped storage node structure. The process utilizes a series of wet clean procedures to prepare the surface of the storage node structure for the formation of an overlying capacitor dielectric layer. The first wet clean procedure employs an ammonium hydroxide-hydrogen peroxide solution to remove CMP residues and HSG silicon particles from the surface of a photoresist plug. Another wet clean procedure follows, starting with a DHF solution and concluding with a sulfuric acid-hydrogen peroxide treatment, ensuring the structure is adequately prepared for the dielectric layer formation.
Career Highlights
Tung Chia Ching is currently associated with Vanguard International Semiconductor Corporation, where he continues to push the boundaries of semiconductor technology. His work has not only advanced the technical capabilities of DRAM structures but has also contributed to the overall efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Tung has collaborated with esteemed colleagues such as Rong-Wu Chien and Hsiao-Chiu Tuan. These collaborations have fostered an environment of innovation and have led to the successful development of advanced semiconductor technologies.
Conclusion
Tung Chia Ching's contributions to the field of semiconductor technology, particularly through his patented processes, highlight his role as a key innovator in the industry. His work continues to influence the development of efficient and effective semiconductor manufacturing techniques.