This inventor holds 6 USPTO granted patents. Top assignees: Ebara Corporation, Kabushiki Kaisha Toshiba. Active years: 2003-2011.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Fujisawa, JP (2003)
- Tokyo, JP (2004 - 2011)
Company Filing History:
Years Active: 2003-2011
Title: Tsuyoshi Tokuoka: Innovator in Semiconductor Plating Technology
Introduction
Tsuyoshi Tokuoka is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the area of plating apparatus and methods. With a total of 6 patents to his name, Tokuoka's innovations have advanced the capabilities of semiconductor manufacturing.
Latest Patents
One of Tokuoka's latest patents involves a plating apparatus designed to form a plated film in fine trenches and plugs for interconnects. This apparatus also creates bumps, or protruding electrodes, on the surface of semiconductor wafers. The design includes a substrate holder that can open and close, allowing the front surface of the substrate to be exposed while hermetically sealing the backside and edges. The plating tank accommodates a plating liquid with an immersed anode, and a diaphragm is positioned between the anode and the substrate. Additionally, plating liquid circulating systems are employed to circulate the plating liquid to various regions of the tank, separated by the diaphragm. A deaerating unit is also integrated into at least one of the circulating systems to enhance the plating process.
Career Highlights
Throughout his career, Tsuyoshi Tokuoka has worked with notable companies such as Ebara Corporation and Toshiba Corporation. His experience in these organizations has allowed him to refine his expertise in semiconductor technology and contribute to innovative solutions in the industry.
Collaborations
Tokuoka has collaborated with esteemed colleagues, including Junichiro Yoshioka and Nobutoshi Saito. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and advancements in technology.
Conclusion
Tsuyoshi Tokuoka's contributions to semiconductor plating technology exemplify his innovative spirit and dedication to advancing the field. His patents and collaborations reflect a commitment to excellence in technology development.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile