Company Filing History:
Years Active: 2014
Title: Tsutomu Yamahata: Innovator in Liquid Processing Technology
Introduction
Tsutomu Yamahata is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of liquid processing technology, particularly through his innovative patent that enhances the efficiency of substrate processing.
Latest Patents
Yamahata holds a patent for a "Liquid processing apparatus and liquid processing method." This invention aims to provide a liquid processing apparatus capable of processing substrates with high throughput while utilizing fewer nozzles for chemical liquids. The design allows for effective liquid processing of substrates that are horizontally held in cup bodies. By employing two types of developing nozzles for different developing methods, the apparatus optimizes the processing time and efficiency.
Career Highlights
Yamahata's career is marked by his work at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative approach to liquid processing has positioned him as a key figure in advancing technology in this sector.
Collaborations
Yamahata has collaborated with notable coworkers, including Yasushi Takiguchi and Taro Yamamoto. Their combined expertise has contributed to the development of advanced technologies in liquid processing.
Conclusion
Tsutomu Yamahata's contributions to liquid processing technology exemplify the impact of innovation in enhancing industrial processes. His patent reflects a commitment to improving efficiency and effectiveness in substrate processing.