Location History:
- Fuchu, JP (1982 - 1992)
- Chiba, JP (1999)
- Tokyo, JP (1983 - 2000)
- Chiba-ken, JP (1999 - 2001)
Company Filing History:
18 out of 256 
4 out of 35,658 
3 out of 13 Years Active: 1982-2001
Title: The Innovations of Tsutomu Tsukada
Introduction
Tsutomu Tsukada is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 18 patents. His work has been instrumental in advancing the capabilities of plasma processing apparatuses.
Latest Patents
One of Tsukada's latest inventions is a plasma processing apparatus that features a cathode with both a large diameter part and a long thin small diameter part. The upper end surface of the large diameter part faces the plasma forming space, where the substrate to be processed is mounted. The lower end of the small diameter part connects to a high-frequency power source via a matching circuit. This design includes a transmission path within the chamber that comprises a large diameter coaxial line, a small diameter coaxial line, and a radial line connecting them. Another notable patent discloses a plasma processing apparatus that utilizes RF energy supplied with a plasma generation gas. This apparatus includes a vacuum chamber, a substrate holder, and a gas introduction means for the plasma generation gas. The antenna design features multiple elements symmetrically arranged, enhancing the efficiency of the RF energy application.
Career Highlights
Tsutomu Tsukada has worked with notable companies such as Anelva Corporation and NEC Corporation. His experience in these organizations has allowed him to refine his expertise in plasma processing technologies and contribute to various innovative projects.
Collaborations
Some of Tsukada's coworkers include Katsumi Ukai and Yukito Nakagawa. Their collaborative efforts have furthered advancements in the field of plasma processing.
Conclusion
Tsutomu Tsukada's contributions to plasma processing technology through his numerous patents highlight his innovative spirit and dedication to advancing this field. His work continues to influence the industry and inspire future innovations.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.