Tsutomu Komoda

Title: Tsutomu Komoda: Innovator in Electron Beam Technology and Mass Spectrometry

Introduction

Tsutomu Komoda is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the fields of electron beam technology and mass spectrometry. With a total of 10 patents to his name, his work has had a lasting impact on various technological advancements.

Latest Patents

One of his latest inventions is an electron beam apparatus. This apparatus comprises an electron beam source, a unit for irradiating an electron beam on a specimen, a detector for secondary electrons, an electrode for generating an electric field sufficient to draw out secondary electrons in a recess in the specimen, and a unit for generating a magnetic field for focusing secondary electrons drawn out of the recess. With this construction, the secondary electrons drawn out of the recess by the electric field reach the detector without being attracted by the electrode. By adopting this construction, a contact hole of high aspect ratio formed in a semiconductor device and having a small diameter and a large depth can be observed.

Another notable invention is a plasma source mass spectrometer. This device allows ions in a plasma generated in a high-pressure region to be introduced into a low-pressure region for mass analysis. It includes a moderate pressure region provided between the high-pressure and low-pressure regions. The plasma generated in the high-pressure region is diffused to the moderate pressure region to produce a diffused plasma. Ions are extracted from the diffused plasma by an ion extraction electrode, which has an ion extraction opening. In the vicinity of the ion extraction opening, a convex shape toward the diffused plasma is formed, creating an ion sheath that allows for high-efficiency extraction of ions toward the low-pressure region.

Career Highlights

Throughout his career, Tsutomu Komoda has worked with notable companies such as Hitachi, Ltd. and Nippon Telegraph and Telephone Corporation. His experience in these organizations has contributed to his expertise and innovative capabilities in his field.

Collaborations

He has collaborated with esteemed colleagues, including Hideo Todokoro and Satoshi Shimura. These partnerships have further enriched his work and led to advancements in technology.

Conclusion

Tsutomu Komoda's contributions to electron beam technology and mass spectrometry exemplify his innovative spirit and dedication to advancing scientific knowledge. His patents continue to influence the industry and inspire