The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 1986
Filed:
Nov. 16, 1984
Applicant:
Inventors:
Hideo Todokoro, Tokyo, JP;
Tsutomu Komoda, Tokyo, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2503 / ; 250398 ;
Abstract
An apparatus for chopping a charged particle beam comprises: deflecting means for deflecting a charged particle beam by a high frequency voltage; deflecting means for deflecting the charged particle beam by a DC voltage or low frequency saw-tooth voltage in the same deflecting direction as the high frequency deflecting means does; and aperture means for taking out only a part of the charged particle beam deflected. The generation time point of the pulse beam which is generated at a high frequency is arbitrarily adjusted by the DC voltage or low frequency saw-tooth voltage.