The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 1987
Filed:
May. 17, 1985
Norio Saitou, Iruma, JP;
Susumu Ozasa, Kashiwa, JP;
Masahide Okumura, Sagamihara, JP;
Mitsuo Ooyama, Hachioji, JP;
Tsutomu Komoda, Nishitama, JP;
Katsuhiro Harada, Tokyo, JP;
Minpei Fujinami, Tokyo, JP;
Kazumi Iwadate, Higashimurayama, JP;
Hitachi, Ltd., Tokyo, JP;
Nippon Telegraph & Telephone Corporation, Tokyo, JP;
Abstract
An electron beam lithography apparatus comprises: a spot electron beam generator; device for exposing a desired pattern onto a wafer using the spot beam; device for dividing the pattern into small regions; and device for designating an origin of the small region and also digitally scanning the portion inside the small region by a fixed correction amount by use of the spot beam, and thereby to reduce the settling time of the D/A converter in association with the digital scanning.