Location History:
- Tokyo, JP (1992 - 1993)
- Kawasaki, JP (1998)
Company Filing History:
Years Active: 1992-1998
Title: Tsutomu Amai: Innovator in Semiconductor Manufacturing
Introduction
Tsutomu Amai is a prominent inventor based in Tokyo, Japan, known for his significant contributions to semiconductor manufacturing. With a total of three patents to his name, Amai has developed innovative methods that enhance the efficiency and quality of semiconductor devices.
Latest Patents
One of Amai's latest patents is a method for manufacturing a semiconductor device that includes a pre-oxidation process. This method effectively reduces micro-roughness without altering the construction and electrical characteristics of the elements formed in the semiconductor device. The process involves forming an oxide layer on a silicon wafer in an oxidization atmosphere that includes H₂O and germanium hydride (GeH₄). By incorporating GeH₄, the softening temperature of the silicon dioxide is reduced, allowing for a low-temperature and short-time pre-oxidation process that maintains the integrity of the semiconductor device.
Another notable patent is a method of manufacturing a semiconductor substrate with a dielectric isolating structure. This invention addresses the nonuniformity in film thickness that can occur due to poor flatness of the semiconductor substrate. By bonding mirror-polished surfaces of two semiconductor substrates around a dielectric layer, and grinding the first substrate to a predetermined thickness, Amai's method improves the precision of film thickness in circuit element formation layers.
Career Highlights
Throughout his career, Tsutomu Amai has worked with notable companies, including Toshiba Corporation. His experience in the semiconductor industry has allowed him to develop cutting-edge technologies that have a lasting impact on the field.
Collaborations
Amai has collaborated with esteemed colleagues such as Masanobu Ogino and Yoshihiro Ueno, contributing to advancements in semiconductor technology through teamwork and shared expertise.
Conclusion
Tsutomu Amai's innovative methods in semiconductor manufacturing demonstrate his commitment to enhancing technology in this critical field. His patents reflect a deep understanding of the complexities involved in semiconductor production, making him a valuable contributor to the industry.