This inventor holds 2 USPTO granted patents. Top assignee: Macronix International Co., Ltd.. Active years: 2005-2006.
Company Filing History:
Years Active: 2005-2006
Title: Innovations of Tsung-Han Peng
Introduction
Tsung-Han Peng is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of technology, particularly in the area of semiconductor manufacturing. With a total of 2 patents to his name, his work has had a considerable impact on the industry.
Latest Patents
One of his latest patents is the "Photoresist pump dispense detection system." This invention features a detection circuit that includes a first relay coupled to a solenoid valve for sensing the operation state of the solenoid valve. Additionally, it has a second relay that activates in response to the first relay, a sensor for detecting the operation state of a device, and a third relay that is activated by the sensor. The fourth relay is also included, which is activated when the first relay is deactivated and the second relay is activated.
Another significant patent is the "Method for monitoring matched machine overlay." This method involves identifying a target machine and process, as well as a plurality of critical layers. It includes obtaining overlay data from designated registration patterns on the wafer as baseline data, providing reference overlay data, and correlating this data to obtain overlay error. The method compares the overlay error with specifications of the target machine and accepts the baseline data when the error is within specifications.
Career Highlights
Tsung-Han Peng is currently employed at Macronix International Co., Ltd., where he continues to innovate and contribute to advancements in semiconductor technology. His work is essential in enhancing the efficiency and accuracy of manufacturing processes.
Collaborations
He has collaborated with notable colleagues such as Chung-Hsin Liu and Hsien-Chung Chen, further enriching the innovative environment at Macronix International Co., Ltd.
Conclusion
Tsung-Han Peng's contributions to the field of semiconductor technology through his patents and collaborations highlight his role as a significant inventor. His work continues to influence advancements in the industry, showcasing the importance of innovation in technology.