Company Filing History:
Years Active: 2004-2006
Title: Tsung-De Lin: Innovator in Semiconductor Technology
Introduction
Tsung-De Lin is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patents. With a total of 2 patents, Lin has demonstrated his expertise and commitment to advancing technology in this critical industry.
Latest Patents
One of Lin's latest patents is a rapid thermal annealing process. This process provides for an RTA equipment that includes a pyrometer for measuring operational parameters, such as temperature. The RTA process involves a first step where a wafer is treated, followed by a comparison of the measured temperature with a reference range. If the temperature is within the acceptable range, a second RTA step is performed. However, if the temperature is outside this range, the equipment is turned off, and the wafer is transferred to another RTA equipment to complete the process.
Another notable patent by Lin is a method of fabricating a shallow trench isolation (STI) structure. This method begins with providing a substrate, followed by the formation of a pad oxide layer, a mask layer, and a first trench. An insulation layer is then created inside the trench, which includes a second trench above the first. A conformal cap layer is formed over the insulation layer, and a reverse mask is applied. The process continues with the removal of specific layers to expose the upper surface of the mask layer, ultimately leading to the removal of the mask and pad oxide layers.
Career Highlights
Tsung-De Lin is currently employed at Macronix International Co., Ltd., where he continues to innovate and contribute to the semiconductor industry. His work has been instrumental in developing advanced technologies that enhance the performance and efficiency of semiconductor devices.
Collaborations
Lin has collaborated with notable colleagues, including Shih-Liang Chou and Wen-Cheng Lien. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Tsung-De Lin is a distinguished inventor whose work in semiconductor technology has led to significant advancements. His patents reflect his dedication to improving processes and structures within the industry. Lin's contributions continue to shape the future of semiconductor technology.