Toshimichi Kubota

Title: Innovations of Toshimichi Kubota in Single-Crystal Silicon Fabrication

Introduction

Toshimichi Kubota is a prominent inventor based in Hiratsuka, Japan, known for his significant contributions to the field of semiconductor technology. He holds a total of 11 patents, showcasing his expertise and innovative spirit in the fabrication of single-crystal silicon.

Latest Patents

Among his latest patents is an "Apparatus for Fabricating Single-Crystal Silicon." This apparatus is designed to easily control the temperature gradient based on the Czochralski (CZ) method, effectively preventing defects during the growth of high-quality single-crystal silicon. The apparatus features a first thermal shield member that surrounds the pulling single-crystal silicon and a second thermal shield member located inside the first. This design allows for the cooling of the solid-liquid interface, ensuring a stable shape of the single-crystal silicon. The temperature gradient in the critical range of 1000°C to 1200°C is reduced using the second thermal shield member, which helps in minimizing crystal defect density and enhancing the oxide film voltage breakdown characteristics of the silicon.

Another notable patent is the "Method of Fabricating a Silicon Single Crystal." This method maintains a consistent cooling speed for the portion near the rear of the single-crystal body, which passes through the defect-forming temperature zone. The heater remains operational while pulling the single crystal, ensuring that the cooling speed throughout the entire body is kept below 15°C/min. This innovative approach allows for a controlled cooling process, which is crucial for producing high-quality single-crystal silicon.

Career Highlights

Toshimichi Kubota has worked with notable companies such as Komatsu Electronic Metals Co., Ltd. and Komatsu Corporation. His experience in these organizations has contributed to his deep understanding of semiconductor manufacturing processes and technologies.

Collaborations

Throughout his career, Kubota has collaborated with esteemed colleagues, including Makoto Kamogawa and Yoshiyuki Shimanuki. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Toshimichi Kubota's contributions to the field of single-crystal silicon fabrication are significant and impactful. His innovative patents and career achievements highlight his role as a leading inventor in semiconductor technology. His work continues to influence advancements in the industry, paving the way for future innovations.