Company Filing History:
Years Active: 2023-2024
Title: Innovations by Toshihiro Kitao
Introduction
Toshihiro Kitao is a notable inventor based in Austin, TX, who has made significant contributions to the field of semiconductor technology. With a total of 3 patents, his work focuses on enhancing the efficiency and accuracy of semiconductor processes.
Latest Patents
Kitao's latest patents include innovative methods for virtual metrology in wafer result prediction. This method involves determining predictor parameters of a semiconductor process using domain knowledge, which includes insights into the semiconductor process, associated processing tools, metrology tools, and the wafer itself. The process also entails removing collinearity among predictor parameters to identify key predictors and selecting a subset based on metrology data obtained from the wafer. Ultimately, a virtual metrology model is built to predict wafer results.
Another significant patent is the virtual metrology enhanced plasma process optimization method. This method optimizes a recipe for a plasma process by building a virtual metrology model that predicts wafer characteristics based on plasma parameters. The process includes measuring the wafer characteristics after performing the plasma process and determining if they fall within a predetermined range. The models are calibrated based on these characteristics, and the recipe is optimized accordingly.
Career Highlights
Toshihiro Kitao is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work has been instrumental in advancing the technology used in semiconductor manufacturing.
Collaborations
Kitao collaborates with talented coworkers, including Jun Shinagawa and Megan Wooley, who contribute to the innovative projects at Tokyo Electron Limited.
Conclusion
Toshihiro Kitao's contributions to semiconductor technology through his patents demonstrate his expertise and commitment to innovation in the field. His work continues to influence the efficiency of semiconductor processes, making a lasting impact on the industry.