Location History:
- Yokohama, JP (1990)
- Kawasaki, JP (1990 - 1995)
Company Filing History:
Years Active: 1990-1995
Title: Innovations of Toshihiko Katsura: A Leader in Semiconductor Technology
Introduction
Toshihiko Katsura, hailing from Kawasaki, Japan, is a dedicated inventor known for his significant contributions to semiconductor technology. With a total of 7 patents to his name, Katsura has transformed the landscape of manufacturing semiconductor devices through innovative techniques and methods.
Latest Patents
Among his latest patents, one notable invention is a method of manufacturing semiconductor devices that enhances electromigration resistance and stress migration resistance. This method involves a stepwise formation of films by modulating the heating temperature of the semiconductor substrate across multiple stages during deposition of Aluminum (Al) or Al alloys.
Another significant patent involves a method for detecting the endpoint of etching in semiconductors. This procedure incorporates the addition of helium gas into the etching gas used for dry-etching materials like aluminum alloy layers, allowing for precise endpoint detection based on the emission spectrum intensity of helium.
Career Highlights
Toshihiko Katsura is currently associated with Kabushiki Kaisha Toshiba, a prominent company in the technology sector. His innovative approaches in semiconductor manufacturing have not only garnered attention within his company but have also contributed significantly to the industry standards in semiconductor device production.
Collaborations
Throughout his career, Katsura has collaborated with esteemed colleagues like Masahiro Abe and Yasukazu Mase. Their teamwork has led to the successful development of various advancements in semiconductor technologies, solidifying their roles as key players in the research and development arena.
Conclusion
Toshihiko Katsura's legacy as an inventor is marked by his dedication to improving semiconductor manufacturing processes. His innovative patents reflect a deep understanding of the technical challenges in the field and demonstrate his commitment to delivering effective solutions. As he continues to drive advancements within Kabushiki Kaisha Toshiba, Katsura remains an influential figure in the realm of semiconductor technology.