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Nirasaki, Japan

Toshiaki Hongoh

USPTO Granted Patents = 15

Average Co-Inventor Count = 2.1

ph-index = 11

Forward Citations = 399(Granted Patents)

Location History:

Nakakoma-Gun, JP (2001 - 2002)
Yamanashi, JP (1993 - 2004)
Yamanashi-ken, JP (1996 - 2006)
Nirasaki, JP (2004 - 2009)

Company Filing History:

15 out of 10,295

Tokyo Electron Limited

Years Active: 1993-2009

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15 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7569497 - Method and apparatus for forming insulating layer (2009-08-04),

2. 7018506 - Plasma processing apparatus (2006-03-28),

3. RE39020 - Plasma process apparatus (2006-03-20),

4. 6797111 - Plasma processing apparatus (2004-09-28),

5. 6736930 - Microwave plasma processing apparatus for controlling a temperature of a wavelength reducing member (2004-05-18),

6. 6675737 - Plasma processing apparatus (2004-01-13),

7. 6470824 - Semiconductor manufacturing apparatus (2002-10-29),

8. 6399520 - Semiconductor manufacturing method and semiconductor manufacturing apparatus (2002-06-04),

9. 6358324 - Microwave plasma processing apparatus having a vacuum pump located under a susceptor (2002-03-19),

10. 6343565 - Flat antenna having rounded slot openings and plasma processing apparatus using the flat antenna (2002-02-05),

11. 6325018 - Flat antenna having openings provided with conductive materials accommodated therein and plasma processing apparatus using the flat antenna (2001-12-04),

12. 5792261 - Plasma process apparatus (1998-08-11),

13. 5716451 - Plasma processing apparatus (1998-02-10),

14. 5525159 - Plasma process apparatus (1996-06-11),

15. 5179498 - Electrostatic chuck device (1993-01-12),

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