Nirasaki, Japan

Toshiaki Hongoh


Average Co-Inventor Count = 2.1

ph-index = 11

Forward Citations = 399(Granted Patents)


Location History:

  • Nakakoma-Gun, JP (2001 - 2002)
  • Yamanashi, JP (1993 - 2004)
  • Yamanashi-ken, JP (1996 - 2006)
  • Nirasaki, JP (2004 - 2009)

Company Filing History:


Years Active: 1993-2009

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15 patents (USPTO):Explore Patents

Title: Toshiaki Hongoh: Innovator in Plasma Processing Technology

Introduction

Toshiaki Hongoh is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 15 patents. His work focuses on methods and apparatuses that enhance the efficiency and effectiveness of electronic device manufacturing.

Latest Patents

One of his latest patents is a method and apparatus for forming an insulating layer. This innovative method involves irradiating a film containing an organic curable material with energy plasma produced by microwave irradiation through a planar antenna member with multiple slits. This process cures the film and forms an insulating film with a dielectric constant of 3 or less. Another notable patent is a plasma processing apparatus that features a plate separating a high-frequency induction antenna from a vacuum chamber. This apparatus includes a nonmagnetic metal plate with an opening, sealed by a dielectric material member, ensuring optimal performance in plasma processing.

Career Highlights

Toshiaki Hongoh is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has been instrumental in advancing plasma processing technologies, which are crucial for the production of high-quality electronic devices.

Collaborations

Throughout his career, Toshiaki has collaborated with notable colleagues such as Kiichi Hama and Jiro Hata. These collaborations have further enriched his research and development efforts in the field of plasma technology.

Conclusion

Toshiaki Hongoh's contributions to plasma processing technology have established him as a key figure in the industry. His innovative patents and work at Tokyo Electron Limited continue to influence the development of advanced electronic devices.

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