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Toru Kagaya

USPTO Granted Patents = 18 (Patent Applications = 3)

Average Co-Inventor Count = 3.0

ph-index = 6

Forward Citations = 117(Granted Patents)

Location History:

Toyoma, JP (2013)
Tokyo, JP (2005 - 2020)
Toyama, JP (2010 - 2024)

Company Filing History:

Hitachi-kokusai Electric Inc.

Kokusai Electric Corporation

Years Active: 2005-2025

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18 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12503768 - Substrate processing apparatus, method of manufacturing semiconductor device, method of processing substrate, and gas injector (2025-12-23),

2. D1020668 - Gas injector for substrate processing apparatus (2024-04-02),

3. D992762 - Protector for maintenance on semiconductor manufacturing equipments (2023-07-18),

4. D925481 - Inlet liner for substrate processing apparatus (2021-07-20),

5. D901406 - Inner tube of reactor for semiconductor fabrication (2020-11-10),

6. D889596 - Gas nozzle for substrate processing apparatus (2020-07-07),

7. D888196 - Gas nozzle for substrate processing apparatus (2020-06-23),

8. D853979 - Reaction tube (2019-07-16),

9. D839219 - Boat for substrate processing apparatus (2019-01-29),

10. 8598047 - Substrate processing apparatus and producing method of semiconductor device (2013-12-03),

11. 8366868 - Substrate processing apparatus (2013-02-05),

12. 8261692 - Substrate processing apparatus and reaction container (2012-09-11),

13. 8211802 - Substrate processing apparatus (2012-07-03),

14. 8047158 - Substrate processing apparatus and reaction container (2011-11-01),

15. 7900580 - Substrate processing apparatus and reaction container (2011-03-08),

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