Location History:
- Chandler, AZ (US) (2004 - 2008)
- Mesa, AZ (US) (2005 - 2012)
Company Filing History:
Years Active: 2004-2012
Title: The Innovative Contributions of Tony J. Keeton
Introduction
Tony J. Keeton is a notable inventor based in Chandler, AZ, who has made significant contributions to the field of substrate support systems. With a total of 8 patents to his name, Keeton's work focuses on enhancing the efficiency and effectiveness of substrate handling in various applications.
Latest Patents
One of Keeton's latest patents is a substrate support system designed for reduced autodoping and backside deposition. This innovative system comprises a substrate holder with multiple passages extending between its top and bottom surfaces. The substrate holder supports the peripheral portion of the substrate backside, creating a thin gap between the substrate and the holder. A hollow support member is integrated to provide support to the underside of the substrate while also conveying gas upward into the passages of the substrate holder. The upwardly conveyed gas flows into the gap, which helps to inhibit backside deposition of reactant gases above the substrate or sweep out-diffused dopant atoms away from the substrate backside, depending on the specific embodiment.
Career Highlights
Tony J. Keeton is currently employed at Asm America, Inc., where he continues to develop innovative solutions in substrate technology. His expertise and dedication to advancing the field have made him a valuable asset to his company and the industry as a whole.
Collaborations
Throughout his career, Keeton has collaborated with several talented individuals, including Ravinder K. Aggarwal and Matthew G. Goodman. These collaborations have further enriched his work and contributed to the success of his innovative projects.
Conclusion
Tony J. Keeton's contributions to substrate support systems exemplify the impact of innovation in technology. His patents and collaborative efforts continue to shape the future of substrate handling and processing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.