This inventor holds 2 USPTO granted patents and 2 published patent applications. Top assignee: Gigaphoton Inc.. Active years: 2021-2026.
Company Filing History:
Years Active: 2021-2026
Title: Tomoyoshi Toida: Innovator in EUV Technology
Introduction
Tomoyoshi Toida is a prominent inventor based in Oyama, Japan. He has made significant contributions to the field of extreme ultraviolet (EUV) technology, particularly in the development of light generation apparatuses and electronic device manufacturing methods. With a total of 2 patents, Toida's work is at the forefront of innovation in this critical area of technology.
Latest Patents
Toida's latest patents include an EUV light generation apparatus and an electronic device manufacturing method. The EUV light generation apparatus features a chamber, a target supply device, and a laser device that outputs pulse laser light to generate plasma. This apparatus is designed to improve the circularity of the EUV light profile at an intermediate focal point. Additionally, his extreme ultraviolet light condensation mirror patent includes a multi-layer reflective film that reflects EUV light with a wavelength of 13.5 nm, enhancing the efficiency of light generation.
Career Highlights
Tomoyoshi Toida is currently associated with Gigaphoton Inc., a company known for its advancements in EUV technology. His work has been instrumental in pushing the boundaries of what is possible in electronic device manufacturing, making significant strides in the efficiency and effectiveness of EUV light generation.
Conclusion
Tomoyoshi Toida's innovative contributions to EUV technology highlight his role as a key figure in the advancement of electronic device manufacturing methods. His patents reflect a deep understanding of the complexities involved in light generation and its applications in modern technology.