This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2019-2022.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Yamanashi, JP (2019)
- Nirasaki, JP (2022)
Company Filing History:
Years Active: 2019-2022
Title: Innovations by Tomonari Urano
Introduction
Tomonari Urano is an inventor based in Nirasaki, Japan. He has made significant contributions to the field of substrate processing. His innovative ideas focus on improving the efficiency and effectiveness of substrate processing apparatuses.
Latest Patent Applications
Tomonari Urano has filed a patent application for a "SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM." This application describes a substrate processing apparatus that includes a substrate mounting table installed in a vacuum vessel. It features a gas supply part that supplies processing gas into the vacuum vessel and a vacuum-exhausting part that exhausts the interior of the vacuum vessel. Additionally, it has an elevating member that lifts a substrate while holding it on the mounting table. The control part outputs a control signal to execute a series of steps involving the processing gas and internal pressure adjustments.
Conclusion
Tomonari Urano's work in substrate processing showcases his innovative approach to enhancing technology in this field. His patent application reflects his commitment to advancing substrate processing methods.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile