Tomoki Okazawa

Title: Innovations by Tomoki Okazawa: A Pioneer in Substrate Processing Technologies

Introduction

Tomoki Okazawa, an innovative inventor based in Koshi, Japan, has made significant contributions to substrate processing technologies. With two patents to his name, Okazawa is recognized for his inventive prowess in developing advanced apparatus and methods for liquid processing.

Latest Patents

Okazawa's latest patents showcase his ingenuity in substrate processing. The first patent is for a **Substrate Processing Apparatus and Substrate Processing Method**, which features a rotary holder designed to hold and rotate a substrate. The apparatus includes a liquid supplier with a nozzle that ejects a processing liquid. It is equipped with a driver that moves the nozzle between the center and peripheral portion of the substrate and a controller that executes a supply control to create a spiral supply trajectory. This method ensures a gradual reduction in the ejection amount of the processing liquid, particularly at the outer edge of the trajectory.

The second patent is titled **Liquid Processing Apparatus and Liquid Processing Method**. This inventive design incorporates a processing liquid supply with a nozzle that discharges the liquid and a nozzle mover that shifts between a coating position and a standby position. Additionally, it features a suction unit for extracting liquid and a cleaning unit to maintain the nozzle's leading end. The control device orchestrates the entire operation, ensuring efficient processing and cleanliness of the nozzle.

Career Highlights

Tomoki Okazawa has established his career at Tokyo Electron Limited, where he has focused on research and development in semiconductor manufacturing technologies. His work has primarily revolved around improving substrate processing methods, contributing to the efficiency and effectiveness of the manufacturing process.

Collaborations

Throughout his career, Okazawa has collaborated with fellow innovators, including Yuta Nishiyama and Takeshi Tobimatsu. These collaborations have fostered a rich environment for knowledge exchange and have been instrumental in advancing their collective work in substrate processing technologies.

Conclusion

Tomoki Okazawa exemplifies the spirit of innovation through his contributions to the field of substrate processing. His patents reflect a commitment to technological advancement and efficiency in liquid processing methods, positioning him as a noteworthy figure in the semiconductor industry. As he continues his work at Tokyo Electron Limited, the impact of his inventions will likely resonate within the industry and beyond.