Company Filing History:
Years Active: 2013-2014
Title: Tomoki Horita: Innovator in Substrate Processing Systems
Introduction
Tomoki Horita is a notable inventor based in Toyama, Japan. He has made significant contributions to the field of substrate processing systems, holding 2 patents to his name. His work is characterized by innovative solutions that enhance the efficiency and effectiveness of substrate processing.
Latest Patents
One of Tomoki Horita's latest patents is a substrate processing system. This system includes a processing chamber designed to process a substrate, a vaporizing unit that vaporizes a liquid material, and a supply system that delivers gas from the vaporized material into the processing chamber. Additionally, it features an exhaust system to remove the atmosphere within the processing chamber and a cleaning liquid supply system that provides at least two types of cleaning liquids to the vaporizing unit. This innovative approach allows for the effective removal of products deposited in the vaporizing unit through the combined action of the two cleaning liquids.
Career Highlights
Tomoki Horita is currently employed at Hitachi Kokusai Electric Inc., where he continues to develop cutting-edge technologies in substrate processing. His expertise and innovative mindset have positioned him as a key player in his field.
Collaborations
Throughout his career, Tomoki has collaborated with talented individuals such as Kazuhiro Hirahara and Hironobu Miya. These collaborations have fostered an environment of creativity and innovation, leading to advancements in substrate processing technologies.
Conclusion
Tomoki Horita's contributions to substrate processing systems exemplify his dedication to innovation and excellence. His patents reflect a commitment to improving technology in this vital area, and his work continues to influence the industry.