The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2014
Filed:
Jul. 15, 2013
Applicant:
Hitachi Kokusai Electric Inc., Tokyo, JP;
Inventors:
Tomoki Horita, Toyama, JP;
Kazuhiro Hirahara, Joetsu, JP;
Hironobu Miya, Toyama, JP;
Atsuhiko Suda, Toyama, JP;
Hirohisa Yamazaki, Toyama, JP;
Assignee:
Hitachi Kokusai Electric Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/00 (2006.01); C03C 23/00 (2006.01); C23G 1/00 (2006.01); C23G 1/02 (2006.01); B44C 1/22 (2006.01); C03C 15/00 (2006.01); C03C 25/68 (2006.01); C23C 16/50 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed is a substrate processing system, including: