Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Hitachi-kokusai Electric Inc. (2 from 1,258 patents)
2 patents:
1. 8641829 - Substrate processing system
2. 8506714 - Substrate processing system