Tomohito Matsuo

Title: Innovations of Tomohito Matsuo in Halogen-Based Gas Processing

Introduction

Tomohito Matsuo is a notable inventor based in Yamanashi, Japan. He has made significant contributions to the field of processing apparatuses, particularly through his innovative work involving halogen-based gas. His expertise and dedication to advancing technology have led to the development of a unique processing method that enhances the efficiency of various applications.

Latest Patents

Matsuo holds 1 patent for his invention titled "Processing method in processing apparatus using halogen-based gas." This patent describes a processing apparatus that performs a predetermined process on an object by supplying halogen-based gas into a vacuum-maintained chamber. The chamber is connected to a member with an oxide film on its surface, allowing for effective processing of the target object. After the processing is completed, oxygen gas or dry air is introduced to purge the chamber before it is opened to the atmosphere.

Career Highlights

Tomohito Matsuo is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics industry. His role at the company allows him to apply his innovative ideas and contribute to the development of advanced technologies. His work has been instrumental in enhancing the capabilities of processing apparatuses used in various applications.

Collaborations

Matsuo collaborates with Hiroshi Nagaike, a fellow innovator in the field. Their partnership fosters a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.

Conclusion

Tomohito Matsuo's contributions to the field of processing apparatuses using halogen-based gas exemplify the spirit of innovation. His patent and ongoing work at Tokyo Electron Limited highlight his commitment to advancing technology and improving processing methods.