Tomohiro Kurebayashi

Title: Tomohiro Kurebayashi: Innovator in Substrate Processing Technology

Introduction

Tomohiro Kurebayashi is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 4 patents. His innovative work focuses on improving the efficiency and effectiveness of substrate processing apparatuses.

Latest Patents

Kurebayashi's latest patents include a substrate processing method and a substrate processing apparatus. The substrate processing method involves an apparatus that features an indexer block and a processing block. One side of the processing block is equipped with a vertical stack of multiple top surface cleaning units, while the other side contains a vertical stack of back surface cleaning units. The design includes reversing units that allow for the substrate to be flipped for various cleaning processes.

The substrate processing apparatus is composed of an indexer block, a first processing block, and a second processing block arranged in parallel. The indexer block is equipped with an indexer robot, while the first processing block contains several back surface cleaning units and a first main robot. The second processing block is designed with multiple end surface cleaning units, top surface cleaning units, and a second main robot, showcasing Kurebayashi's commitment to advancing substrate processing technology.

Career Highlights

Kurebayashi has built a successful career at Screen Holdings Co., Ltd., where he continues to innovate and develop new technologies. His work has been instrumental in enhancing the capabilities of substrate processing systems, making them more efficient and reliable.

Collaborations

Throughout his career, Kurebayashi has collaborated with notable colleagues, including Ichiro Mitsuyoshi and Jun Shibukawa. These partnerships have contributed to the development of cutting-edge technologies in the field.

Conclusion

Tomohiro Kurebayashi is a key figure in the realm of substrate processing technology, with a proven track record of innovation and collaboration. His contributions continue to shape the industry and pave the way for future advancements.