The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Mar. 15, 2013
Applicant:
Dainippon Screen Mfg. Co., Ltd., Kyoto-shi, Kyoto, JP;
Inventors:
Ichiro Mitsuyoshi, Kyoto, JP;
Jun Shibukawa, Kyoto, JP;
Shinji Kiyokawa, Kyoto, JP;
Tomohiro Kurebayashi, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 1/02 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B08B 1/02 (2013.01); H01L 21/67051 (2013.01); H01L 21/67742 (2013.01); H01L 21/67778 (2013.01); H01L 21/67011 (2013.01);
Abstract
A substrate processing apparatus is composed of an indexer block, a first processing block and a second processing block that are provided in parallel with one another. The indexer block is provided with an indexer robot. The first processing block is provided with a plurality of back surface cleaning units and a first main robot. The second processing block is provided with a plurality of end surface cleaning units, a plurality of top surface cleaning units and a second main robot.