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Jun Shibukawa

USPTO Granted Patents = 7 (Patent Applications = 1)

Average Co-Inventor Count = 3.5

ph-index = 3

Forward Citations = 21(Granted Patents)

Company Filing History:

Screen Holdings Co., Ltd.

Dainippon Screen Mfg. Co., Ltd.

Years Active: 2012-2018

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10040102 - Substrate processing method (2018-08-07),

2. 9327918 - Substrate processing apparatus and substrate processing method for performing cleaning process and the like on substrate (2016-05-03),

3. 9324602 - Substrate inverting apparatus and substrate processing apparatus (2016-04-26),

4. 9050635 - Substrate processing apparatus (2015-06-09),

5. 9050634 - Substrate processing apparatus (2015-06-09),

6. 8919358 - Substrate processing apparatus (2014-12-30),

7. 8316497 - Substrate processing apparatus (2012-11-27),

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