Company Filing History:
Years Active: 2011-2013
Title: Innovations by Tomio Kubo
Introduction
Tomio Kubo is a notable inventor based in Annaka, Japan. He has made significant contributions to the field of semiconductor technology, holding two patents that showcase his expertise and innovative spirit. His work focuses on improving the efficiency and effectiveness of semiconductor substrate processing.
Latest Patents
Kubo's latest patents include a semiconductor substrate planarization apparatus and a planarization method. This invention involves a planarization apparatus and method that thins and planarizes a substrate by grinding and polishing the rear surface with high throughput. It aims to fabricate a semiconductor substrate with reduced adhered contaminants. The apparatus houses various mechanism elements in different chambers, including a loading/unloading stage chamber and polishing and grinding stage chambers. The throughput time of the polishing stage, which can simultaneously polish two substrates, is typically about double that of the grinding stage, which processes one substrate.
Another significant patent is the substrate flat grinding device. This device is designed to provide high rigidity and features three fastening plate lifting-and-lowering mechanisms with kinematic couplings. The cylinder rod moves the fastening plate upward or downward, ensuring minimal deflection in the thickness distribution of substrates, even for large semiconductor substrates with a diameter of 450 mm.
Career Highlights
Tomio Kubo is currently employed at Okamoto Machine Tool Works, Ltd., where he continues to develop innovative solutions in semiconductor processing. His work has been instrumental in advancing the technology used in the industry.
Collaborations
Kubo has collaborated with notable colleagues, including Moriyuki Kashiwa and Kazuo Kobayashi. Their combined expertise has contributed to the successful development of advanced semiconductor technologies.
Conclusion
Tomio Kubo's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His innovative approaches continue to shape the future of semiconductor processing.