San Jose, CA, United States of America

Tomas Sadilek


Average Co-Inventor Count = 8.0

ph-index = 2

Forward Citations = 28(Granted Patents)


Company Filing History:


Years Active: 2018-2020

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2 patents (USPTO):

Title: Innovations of Tomas Sadilek in Tungsten Film Technology

Introduction

Tomas Sadilek is a notable inventor based in San Jose, CA, who has made significant contributions to the field of semiconductor manufacturing. He is recognized for his innovative approaches to depositing tungsten films, which are crucial in various electronic applications. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of tungsten film deposition processes.

Latest Patents

Tomas Sadilek's latest patents include methods for forming low resistivity fluorine-free tungsten films without the need for nucleation layers. One of his patents details methods of depositing fluorine-free tungsten by sequential chemical vapor deposition (CVD) pulses. This involves alternately pulsing a fluorine-free tungsten precursor and hydrogen in cycles of temporally separated pulses. Some methods described in his patents allow for the direct deposition of tungsten on substrate surfaces using alternating pulses of a chlorine-containing tungsten precursor and hydrogen, without the need for surface treatment. These innovations aim to streamline the deposition process and improve the quality of tungsten films.

Career Highlights

Tomas Sadilek is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. His work at Lam Research has positioned him as a key player in advancing tungsten film technology. His contributions have been instrumental in developing methods that enhance the performance of semiconductor devices.

Collaborations

Tomas collaborates with talented individuals such as Hanna Bamnolker and Joshua Collins, who share his commitment to innovation in the semiconductor industry. Their teamwork fosters an environment of creativity and technical excellence.

Conclusion

Tomas Sadilek's contributions to tungsten film technology exemplify the spirit of innovation in the semiconductor field. His patents reflect a deep understanding of material science and engineering, paving the way for advancements in electronic manufacturing.

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