This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Entegris, Inc.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Tom M Cameron - Innovator in Microelectronics
Introduction
Tom M Cameron is a notable inventor based in Newtown, CT (US). He has made significant contributions to the field of microelectronics through his innovative work. His expertise lies in developing precursor compounds that are essential for advanced lithography techniques.
Latest Patents
Cameron holds a patent for "Tin(II) amide/alkoxide precursors for EUV-patternable films." This invention provides certain mixed Sn (II) amide/alkoxide precursor compounds. These compounds are useful in precursor compositions in the vapor deposition of tin-containing films, such as tin oxide films, onto the surface of microelectronic devices. The precursor compounds are particularly beneficial in extreme ultraviolet light (EUV) lithography techniques used in microelectronic device manufacturing. When paired with specific counter-reactants in a vapor deposition process, the resulting organotin polymeric surface becomes EUV-patternable. This means that when exposed to a patterned beam of EUV light, the exposed portions undergo further reaction, creating regions that are chemically and physically different. This difference enables further processing and lithography of both exposed and non-exposed regions, ultimately aiding in the fabrication of microelectronic devices.
Career Highlights
Cameron is currently employed at Entegris, Inc., where he continues to push the boundaries of innovation in microelectronics. His work has been instrumental in advancing the technology used in the manufacturing of microelectronic devices.
Collaborations
One of his notable collaborators is David M Ermert. Together, they have worked on various projects that enhance the capabilities of microelectronic manufacturing processes.
Conclusion
Tom M Cameron's contributions to the field of microelectronics, particularly through his patented innovations, have made a significant impact on the industry. His work continues to influence the development of advanced manufacturing techniques for microelectronic devices.