Tom Leviant

Title: The Innovations of Tom Leviant

Introduction

Tom Leviant is an accomplished inventor based in Yoqneam Illit, Israel. He holds a total of 3 patents that showcase his expertise in optical metrology and measurement accuracy. His work has significantly contributed to advancements in the field, making him a notable figure among inventors.

Latest Patents

One of Tom's latest patents focuses on accuracy improvements in optical metrology. This patent provides methods, metrology modules, and target designs that enhance the accuracy of metrology measurements. The methods allow for flexible handling of multiple measurement recipes and setups, enabling their relation to landscape features that indicate resonance regions and flat regions. Techniques such as clustering of recipes, self-consistency tests, common processing of aggregated measurements, noise reduction, and detailed analysis of the landscape and targets with skewed cells are employed to achieve cumulative improvements in measurement accuracy.

Another significant patent is a system and method for applying harmonic detectivity as a quality indicator for imaging-based overlay measurements. This patent describes an image-based overlay metrology system that includes a controller connected to a metrology sub-system. The controller receives image signals from a metrology target and determines harmonic detectivity metric values for each signal. It identifies optical measurement conditions based on these values, defining a recipe for optical metrology measurements. The controller then provides this recipe to the metrology sub-system for executing measurements on additional metrology targets.

Career Highlights

Throughout his career, Tom has worked with notable companies such as KLA Corporation and KLA-Tencor Corporation. His experience in these organizations has allowed him to refine his skills and contribute to significant advancements in metrology technology.

Collaborations

Tom has collaborated with talented individuals in his field, including Barak Bringoltz and Ido Adam. These collaborations have further enriched his work and contributed to the success of his inventions.

Conclusion

Tom Leviant's contributions to optical metrology through his innovative patents demonstrate his commitment to enhancing measurement accuracy. His work continues to influence the field and inspire future advancements.