Sunnyvale, CA, United States of America

Tom K Choi

USPTO Granted Patents = 21 


Average Co-Inventor Count = 4.4

ph-index = 6

Forward Citations = 254(Granted Patents)


Location History:

  • San Jose, CA (US) (2003 - 2009)
  • Santa Clara, CA (US) (2010 - 2014)
  • Sunnyvale, CA (US) (2014 - 2020)

Company Filing History:


Years Active: 2003-2020

where 'Filed Patents' based on already Granted Patents

21 patents (USPTO):

Title: Innovation and Impact: An Insight into Tom K Choi's Contributions to Semiconductor Technology

Introduction: Tom K Choi, based in Sunnyvale, CA, has made significant strides in the field of semiconductor technology with a remarkable portfolio of 21 patents to his name. His innovative approaches to reducing particles in semiconductor process chambers have paved the way for advancements in manufacturing efficiency and product quality.

Latest Patents: Among his latest contributions, Choi has developed several noteworthy patents, including an apparatus and methods for reducing particles in semiconductor process chambers. One embodiment features a vacuum screen assembly designed to prevent particles generated by the vacuum pump from entering substrate processing regions. Another innovative patent introduces a perforated chamber liner that surrounds the processing region of the substrate, along with a gas distributing chamber liner intended for distributing a cleaning gas around the substrate support. Additionally, he has focused on methods for footing removal for nitride spacers, which includes the formation of inert plasma to modify the surface of exposed materials on semiconductor substrates. These advancements reflect his commitment to enhancing the performance and reliability of semiconductor processing.

Career Highlights: Throughout his career, Tom K Choi has contributed to major industry players such as Applied Materials, Inc. and Lam Research Corporation. His extensive experience in these companies has cemented his reputation as a leader in semiconductor technology, focusing on improving processing techniques and equipment.

Collaborations: Choi’s innovative journey has been further enriched through collaboration with esteemed colleagues, including Jungmin Ko and Sean S Kang. These partnerships have fostered a creative environment, driving the development of cutting-edge solutions within the semiconductor sector.

Conclusion: Tom K Choi's dedication to innovation is evident through his patents and the impact of his work in semiconductor processing. His contributions not only enhance technology but also inspire future generations of engineers and inventors in the semiconductor field. With a robust track record, Choi remains a notable figure in advancing the realm of semiconductor technology.

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