Tom Anderson

Title: Innovations of Tom Anderson

Introduction

Tom Anderson is a notable inventor based in Hayward, California. He has made significant contributions to the field of semiconductor technology, holding a total of four patents. His work primarily focuses on enhancing the efficiency and performance of semiconductor substrate supports in plasma processing chambers.

Latest Patents

One of Tom Anderson's latest patents is a power switching system for an electrostatic chuck (ESC) that features an array of thermal control elements. This innovative semiconductor substrate support is designed to maintain a precise spatial temperature profile on the semiconductor substrate. The heater array consists of thermal control elements that define multiple heater zones, each powered by multiple power supply and return lines. This configuration allows for improved thermal management and efficiency. The power distribution circuit is integrated with a baseplate of the substrate support, ensuring that each heater zone receives independent time-averaged power through time divisional multiplexing of various switches.

Career Highlights

Tom Anderson has built a successful career at Lam Research Corporation, where he has been instrumental in developing advanced semiconductor technologies. His expertise in power distribution and thermal control systems has positioned him as a key player in the industry. His innovative solutions have contributed to the advancement of semiconductor manufacturing processes.

Collaborations

Tom has collaborated with several talented individuals, including Keith William Gaff and Keith Laurence Comendant. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Tom Anderson's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His work continues to impact the efficiency and performance of semiconductor manufacturing processes.