The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2007
Filed:
Dec. 16, 2003
Applicants:
Randolph E. Treur, San Luis Obispo, CA (US);
John M. Boyd, Atascadero, CA (US);
Tom Anderson, Livermore, CA (US);
John DE Larios, Palo Alto, CA (US);
Inventors:
Randolph E. Treur, San Luis Obispo, CA (US);
John M. Boyd, Atascadero, CA (US);
Tom Anderson, Livermore, CA (US);
John de Larios, Palo Alto, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01); B08B 6/00 (2006.01); C25F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus for brushing a surface of a substrate is provided. The apparatus includes a brush for scrubbing the surface of the substrate, a head for holding the brush, and an arm. The arm is configured to hold the head about a connection point. The arm is connected to an oscillating mechanism configured to cause the head to oscillate at an angle of rotation about the connection point.