The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7237564 B1

PDF
Full Text
Expired
Date of Patent:
Jul. 03, 2007

Filed:

Feb. 20, 2003
Applicants:

Tom Anderson, Livermore, CA (US);

John M. Boyd, Atascadero, CA (US);

Inventors:

Tom Anderson, Livermore, CA (US);

John M. Boyd, Atascadero, CA (US);

Assignee:

Lam Research Corporation, Fremont, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/00 (2006.01); B06B 1/06 (2006.01);
U.S. Cl.
CPC ...
Abstract

A transducer for use in an acoustic energy cleaner is provided. The transducer includes a resonator and a plurality of crystals bonded to a surface of the resonator. The plurality of crystals is configured to be bonded to the surface of the resonator in a staggered arrangement with respect to each other. In one embodiment, the plurality of crystals is bonded to the surface of the resonator in a horizontally staggered arrangement. In another embodiment, the plurality of crystals is bonded to the surface of the resonator in a vertically staggered arrangement.


Find Patent Forward Citations

Anderson, Tom. (2007). Distribution of energy in a high frequency resonating wafer processing system (U.S. Patent No. 7237564). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7237564

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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