This inventor holds 1 USPTO granted patent and 1 EPO patent. Top assignee: Heraeus Quarzglas Gmbh & Co Kg. Active years: 2010.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2010
Title: Innovations of Tobias Pogge in Quartz Glass Technology
Introduction
Tobias Pogge is a notable inventor based in Muehlheim, Germany. He has made significant contributions to the field of semiconductor processing through his innovative work with quartz glass. His expertise and dedication have led to the development of a unique patent that addresses the challenges faced in this industry.
Latest Patents
Tobias Pogge holds a patent for a holder made from quartz glass for the processing of semiconductor wafers. This invention is particularly valuable in environments that have an etching effect. The patent outlines an ideal quartz glass for a wafer jig, characterized by high purity and high resistance to dry etching. The invention suggests that the quartz glass is doped with nitrogen in a near-surface area, has a mean content of metastable hydroxyl groups of less than 30 wt ppm, and maintains a fictive temperature below 1250°C. Additionally, the viscosity of the quartz glass is at least 10 dPa·s at a temperature of 1200°C. The economic method for producing this quartz glass involves several steps, including melting SiO2 raw material, dehydration measures, and nitriding treatments in an ammonia-containing atmosphere.
Career Highlights
Tobias Pogge is associated with Heraeus Quarzglas GmbH & Co. KG, a company renowned for its expertise in quartz glass technology. His work at this organization has allowed him to focus on advancing the applications of quartz glass in semiconductor manufacturing. His innovative approach has positioned him as a key figure in this specialized field.
Collaborations
Tobias has collaborated with notable colleagues, including Juergen Weber and Martin Trommer. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Tobias Pogge's contributions to quartz glass technology have made a significant impact on the semiconductor industry. His innovative patent and collaborative efforts highlight his commitment to advancing this field. His work continues to influence the development of high-performance materials essential for modern technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile