Company Filing History:
Years Active: 2003-2006
Title: Innovations of Tobias Pflanz in Gas Discharge Lasers
Introduction
Tobias Pflanz is a notable inventor based in Munich, Germany, recognized for his contributions to the field of gas discharge lasers. With a total of three patents to his name, Pflanz has made significant advancements that enhance the efficiency and precision of laser technology.
Latest Patents
One of Pflanz's latest patents is for a high repetition rate gas discharge laser with precise pulse timing control. This innovative laser is compact and modular, designed to operate at pulse repetition rates of 1000 to 4000 Hz. It serves as a light source for rapid inspections of wafers in integrated circuit fabrication processes and is also useful for reticle writing at high speeds. The laser features a pulse control unit that ensures timing accuracy of less than 4 nanoseconds. Additionally, it can operate with various gas mixtures, producing ultraviolet light pulses at different wavelengths.
Another significant patent involves a gas discharge laser that includes a discharge tube with an aperture for laser beam emergence. This invention introduces a method for operating the gas discharge laser and utilizes a sintered filter for cleaning the gas withdrawn from the discharge tube. This innovation enhances the operational efficiency of gas discharge lasers by ensuring the purity of the gas used.
Career Highlights
Throughout his career, Tobias Pflanz has worked with prominent companies in the laser technology sector, including Cymer, Inc. and Tui Laser AG. His experience in these organizations has contributed to his expertise in developing advanced laser systems.
Collaborations
Pflanz has collaborated with notable professionals in the field, including Claus Strowitzki and Stephan Geiger. These partnerships have fostered innovation and the sharing of knowledge within the laser technology community.
Conclusion
Tobias Pflanz's contributions to gas discharge laser technology demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of the complexities involved in laser systems, paving the way for future advancements in the field.