The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2004
Filed:
Jul. 25, 2002
Stephan Geiger, Hebertshausen, DE;
Claus Strowitzki, Gilching, DE;
Tobias Pflanz, Munich, DE;
Ansgar Matern, Germering, DE;
Thomas Petracek, Munich, DE;
Martin Kappels, Worthsee, DE;
Andreas Goertler, Weil, DE;
TuiLaser AG, Germering, DE;
Abstract
The invention relates to a gas discharge laser including a discharge tube ( ), in which a gas is present and which has at least one aperture ( ) through which a laser beam emerges or at which a laser beam is reflected. For withdrawing a partial amount of the gas contained in the discharge tube ( ), at least one gas withdrawal point ( ) is present, from which the withdrawn gas is supplied to a sintered filter ( ) for being cleaned. The cleaned gas may be led in via at least one gas inlet point ( ) in the zone of the aperture ( ). The invention further relates to a method of operating a gas discharge laser, and the use of a sintered filter for cleaning gas withdrawn from a discharge tube ( ) of a gas discharge laser.