This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Innovations by Ting-wen Chen in Slurry Monitoring Technology.
Introduction
Ting-wen Chen is an accomplished inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of slurry monitoring technology, particularly in the context of chemical mechanical polishing (CMP) systems. His innovative approach has led to the development of a unique slurry monitoring device that enhances the efficiency and accuracy of CMP processes.
Latest Patents
Ting-wen Chen holds a patent for a slurry monitoring device, CMP system, and method of in-line monitoring a slurry. This invention includes a slurry metrology cell, a plurality of light sources, at least one optical lens, and at least one optical detector. The slurry metrology cell is designed to accommodate a slurry, while the light sources emit light beams onto the slurry. The optical lens modifies the size of the light spot of the light beams impinging on the slurry. The optical detector is responsible for detecting the intensity of the light beams scattered by abrasive particles in the slurry. This innovative technology aims to improve the monitoring and control of slurry properties during CMP processes.
Career Highlights
Ting-wen Chen is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work at this prestigious company has allowed him to apply his expertise in slurry monitoring technology to real-world applications, contributing to advancements in semiconductor manufacturing.
Collaborations
Ting-wen Chen collaborates with Chi Wen Kuo, a talented woman in the field. Their partnership exemplifies the importance of teamwork in driving innovation and achieving breakthroughs in technology.
Conclusion
Ting-wen Chen's contributions to slurry monitoring technology demonstrate his commitment to innovation in the semiconductor industry. His patented inventions are paving the way for more efficient and effective CMP processes, showcasing the impact of his work on modern manufacturing techniques.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile