Location History:
- Utrecht, NL (2013)
- Prevessin-Moëns, FR (2014)
Company Filing History:
Years Active: 2013-2014
Title: Tim Tsarfati: Innovator in Reflective Optical Elements
Introduction
Tim Tsarfati is a notable inventor based in Prevessin-Moëns, France. He has made significant contributions to the field of optical engineering, particularly in the development of reflective optical elements. With a total of 2 patents to his name, Tsarfati's work is recognized for its innovative approach to manufacturing optical components.
Latest Patents
One of Tsarfati's latest patents is focused on a reflective optical element designed for use in extreme ultraviolet (EUV) lithography. This invention is configured for an operating wavelength in the range from 5 nm to 12 nm. The reflective optical element includes a multilayer system composed of at least two alternating materials that possess differing real parts of the refractive index at the operating wavelength. The material with the lower real part of the refractive index can be a nitride or a carbide. Alternatively, it may include thorium, uranium, or barium, while the material with the higher real part of the refractive index is boron or boron carbide.
Another patent by Tsarfati also pertains to a reflective optical element for EUV lithography, specifically designed for the soft X-ray or extreme ultraviolet wavelength range. This invention similarly features a multilayer system with alternating materials that have differing refractive indices. A further layer of a nitride or carbide of the material with the lower real part is arranged at the interface between the two materials. The preferred materials for the lower real part of the refractive index include lanthanum or thorium, and the layers are applied using a plasma-based process.
Career Highlights
Tim Tsarfati is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and solutions. His work at this esteemed organization has allowed him to push the boundaries of optical technology and contribute to advancements in the industry.
Collaborations
Throughout his career, Tsarfati has collaborated with notable colleagues, including Erwin Zoethout and Eric Louis. These collaborations have further enriched his work and contributed to the development of innovative optical solutions.
Conclusion
Tim Tsarfati is a distinguished inventor whose contributions to reflective optical elements have made a significant impact in the field of optical engineering. His patents reflect a deep understanding of materials and their applications in