Tien-Cheng Lan

Title: Tien-Cheng Lan: Innovator in Cleaning Solutions and Damascene Processes

Introduction

Tien-Cheng Lan is a notable inventor based in Taipei County, Taiwan. He has made significant contributions to the field of cleaning solutions and damascene processes, holding a total of 4 patents. His innovative work has implications for various industries, particularly in semiconductor manufacturing.

Latest Patents

Lan's latest patents include a cleaning solution that features an aliphatic polycarboxylic acid, a chain sulfonic acid at less than 4 wt %, and an amine-containing buffer agent. This cleaning solution is designed to enhance the efficiency of cleaning processes. Additionally, he has developed a damascene process that utilizes a cleaning solution containing a fluorine compound, an inorganic acid, a chelating agent with a carboxylic group, and water. The fluorine compound is present at a concentration of 0.01-0.5 wt %, while the inorganic acid ranges from 1-5 wt %.

Career Highlights

Tien-Cheng Lan is currently employed at United Microelectronics Corporation, where he applies his expertise in developing advanced cleaning solutions and processes. His work is crucial in improving the quality and efficiency of semiconductor manufacturing.

Collaborations

Lan has collaborated with notable colleagues, including An-Chi Liu and Chih-Chien Huang, contributing to various projects that enhance the technological landscape in their field.

Conclusion

Tien-Cheng Lan's innovative contributions to cleaning solutions and damascene processes underscore his importance as an inventor in the semiconductor industry. His patents reflect a commitment to advancing technology and improving manufacturing processes.